Numerical Simulation of Semiconductor Devices

نویسنده

  • Siegfried Selberherr
چکیده

The state of the art in self-consistent numerical modeling of semiconductor devices is reviewed. The physical assumptions which are required to describe carrier transport are discussed. Particular emphasis is put on the models for space charge, carrier mobility, carrier temperature, and carrier generationrecombination. Investigations about three-dimensional effects due to the field oxide in MOS-devices analyzed with MINIMOS 5 are presented.

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تاریخ انتشار 2014